Ultra-Reliable RF MEMS Switch

RF MEMS switch in small package for high RF applications
Menlo's RF MEMS switch using digital micro switch technology achieves small form factor
RF MEMS switch die on glass substrate

Menlo Micro introduced the smallest and most reliable RF MEMS switch, achieve higher RF and power capability without any reliability trade-off.  Their 3B cycle life expectation superior to other traditional mechanical switch solutions including other conventional MEMS switches.  Menlo Micro’s technology is raised by GE Global Research, and its DNA continues in Menlo Micro’s products.

Ultra-reliable GE-2 Alloy

GE approached MEMS reliability issues not as a semiconductor company, but with decades of experience in high-performance
alloys. As a result, Menlo Micro implements the same material methodology for RF MEMS development and achieves the incomparable results of reliability in such a tinny package.

Strength and Hot Switching

RF MEMS switch life expectancy

Our mechanical switching device has lifetimes more than 1000x longer than traditional mechanical switches; not millions of cycles, but 10s of billions of cycles without degrading performance.

Fab Process Steps

Avoid complexity, less cost, higher product yield.  All switches are manufactured using automated wafer-level processes and tools.  They are so small we can fit hundreds of them in a space smaller than 10mm2.

A novel micro-mechanical switch architecture based on an ultra-reliable material set, incorporating new design and processing techniques.  Over 10+ years of development, over 40 patent families, and know-how covering materials & fabrication processes, as well as system architecture, design, test.


New! High Power DPDT MEMS Products for Differential Signal Applications

MM5600 – DC to 40Gbps DPDT MEMS Switch with LoopBack

The MM5600 is a high-power DPDT switch that can handle greater than 40 Gbps signals and is perfect for high-speed differential signal switching such as PCIx Gen 5. The MM5600’s integrated driver can be controlled by a serial-to-parallel interface that drives the high voltage gate lines of the switches. The design also offers a considerable 94% reduction in size when compared to conventional EM relay solutions. Noticeably, MM5600 has LoopBack capability for Automated Test Equipment (ATE) and DUT test applications (DIB/Loadboard).

Features

  • DC to 24GHz Frequency Range (40Gbps)
  • 8W CW @ 6GHz into 50 Ohm
  • Low On-state Insertion Loss < 3.0 dB @ 24GHz
  • -25dB Isolation @ 12GHz
  • Signal Integrity Eye(W) 33pS, Jitter 4pS pk-to-pk
  • Low and Stable On-state Resistance < 1.0 Ohm
  • Power Consumption 20mW
  • High Reliability > 3 Billion Switching Operations
  • Switching Speed < 10uS
  • 8mm x 8mm QFN (surface mount)

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Smallest RF Tuning MEMS Products

MM5130 – DC to 26GHz SP4T RF MEMS switch with WLCSP

The MM5130 device is a high power SP4T Ideal Switch offered by Menlo Micro. Menlo Micro has developed a new Ideal Switch fabrication process and applied it to DC and wideband RF/microwave switch applications.  This innovative technology enables robust and highly reliable switches capable of greater than 25 W forward power. The MM5130 provides ultra-low insertion loss and superior linearity from 26GHz down to DC, with greater than 3.0 billion switching cycles guaranteed at +85ºC.  The MM5130 is an ideal solution for replacing large high power RF electromechanical relays, as well as RF/microwave solid-state switches in applications where linearity and insertion loss are critical parameters. The four switch channels are individually controllable by applying a voltage to the corresponding RF GATE pin.

Features

  • DC to 26GHz Frequency range (Super-port Mode)
  • 25 Watt (CW), 150W (Pulsed) Max Power Handling
  • Low On-State Insertion Loss < 1.3 dB @ 18GHz
  • High-linearity, IP3 > 95dBm
  • Low On-State Resistance < 0.5 Ω
  • -18dB Isolation @ 18GHz
  • Maximum voltage (AC or DC): +150 Volt on RF Input
  • High Reliability > 3 Billion Switching Operations
  • Switching Speed < 10uS
  • 2.5mm x 2.5mm WLCSP package
RF MEMS switch MM5130

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RF Tuning MEMS Products

MM5120 – DC to 12GHz SP4T RF MEMS Switch with Integrated Gate Driver

The MM5120 is a high-power RF MEMS switch offered by Menlo Micro, which has developed a new Digital-Micro-Switch (DMS) fabrication process and applied it to DC and RF/microwave switch applications. The innovative DMS technology enables highly reliable micro-mechanical switches capable of > 25 watts in a very small SMT package. The MM5120 provides ultra-low insertion loss and superior linearity from 12GHz down to DC, with greater than 3 billion switching cycles guaranteed at elevated +85°C temperatures. An integrated analog gate controller allows the user the option to provide the required high-voltage gate signal externally or to generate it internally. The MM5120 is an ideal solution for replacing bulky and less reliable RF electromechanical relays, as well as RF/microwave solid-state switches where linearity and insertion loss are critical parameters.

Features

  • DC to 12GHz Frequency Range
  • 25 Watt (CW), 150W (Pulsed) Max Power Handling
  • Low On-State Insertion Loss < 0.75 dB @ 12GHz
  • High-linearity, IP3 > 85dBm
  • Low On-State Resistance < 0.5 Ω
  • -22dB Isolation @ 12GHz
  • Maximum voltage (AC or DC): +150 Volt on RF Input
  • High Reliability > 3 Billion Switching Operations
  • Switching Speed < 10uS
  • Integrated Analog Gate Control with HV Boost
  • 4mm x 4mm 28 Lead BGA Package
MM5120 RF MEMS Switch with DC to 12GHz SP4T configuration
MM5120 RF MEMS Switch Schematics

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MM3100 – 6 Channel SPST RF MEMS Switch

The MM3100 device is a high power 6-channel SPST MEMS switch, which has developed a new Digital-Micro-Switch (DMS) fabrication process and applied it to DC and wideband RF/microwave switch applications. This innovative DMS technology enables robust and highly reliable switches capable of > 25 watts. Each switch provides ultra-low on-state insertion loss and high off-state isolation from DC to > 3 GHz with greater than 3 billion switching cycles at elevated +85ºC temperatures. Each switch is individually controlled by a standard Serial Peripheral Interface (SPI) synchronous bus. An external +5 VDC logic supply and high voltage +77 VDC bias source are required for the operation of the internal switch driver.

Features

  • DC to > 3 GHz Frequency Range
  • 25 Watt (CW), 150W (Pulsed) Max Power Handling
  • Low On-State Insertion Loss < 0.3 dB @ 3 GHz
  • Low On-State Resistance < 0.75 Ω
  • -25dB Isolation @ 3 GHz
  • Maximum voltage (AC or DC): +150 Volt on RF Input
  • < 10us On/Off Switching Time
  • High Reliability > 3 Billion Switching Operations
  • Integrated SPI Bus Gate Control
  • Hermetic 6mm x 6mm x 1.3mm BGA Package
RF MEMS switch MM3100

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New! LF MEMS Switch Products

MM1200 – 6 Channel SPST MEMS Switch

The MM1200 device is a 6-channel SPST Micro MEMS switch developed and manufactured by Menlo Micro. It is intended for power and signals switching applications in both DC and AC circuits. Reliable, innovative DMS technology enables robust and highly reliable switches capable of 1.0 A per channel. The DMS technology enables low on-state contact resistance and high off-state isolation with greater than 3 billion switching cycles at elevated +85ºC temperatures. Each switch is normally open (NO) and individually controlled by a Serial Peripheral Interface (SPI) bus. An external +5 VDC logic supply and high voltage +77 VDC bias source are required for the operation of the internal switch driver.

Features

  • 1.0A per channel / 3.0A Total Current
  • Maximum voltage (AC or DC): +150 Volt on RF Input
  • Low On-State Resistance < 1.0 Ω
  • 10GΩ Input to Output Isolation
  • < 10us On/Off Switching Time
  • High Reliability > 3 Billion Switching Operations
  • Integrated SPI Bus Gate Control
  • Hermetic 6mm x 6mm x 1.3mm BGA Package

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High Voltage MEMS Switches

M7100 – High-Voltage SPST MEMS Switch

The MM7100 is a high-voltage SPST MEMS switch, utilizing Menlo Micro’s Digital-Micro-Switch (DMS) fabrication process. The innovative DMS technology enables highly reliable micro-mechanical switches capable of carrying high voltage and high current in a small SMT form factor. The MM7100 provides ultra-low on-state resistance and high off-state isolation, with greater than 3 billion switching cycles guaranteed at +85ºC. Because of its long lifetime, extremely low current consumption, and small form factor, the MM7100 is an ideal solution for replacing electromechanical relays, as well as pin diode switches where size, weight, power, and thermal management are critical system-level design parameters.

Features

  • Frequency Range: DC to 750 MHz
  • Low On-State Resistance < 0.30Ω (typ.)
  • Rated Voltage (AC or DC): 400V
  • Rated Current (AC or DC): 2A
  • Switching Time: 5 us (close or open operation)
  • High Switching Reliability: > 3 Billion Operations
  • Non-Magnetic LCC Package

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